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Figure 2: (a) Layout design, (b) Top view of a typical metal line generated, (c) cross sectional view of the metal line, (d) LER status of RMS and Correlation length split.

A Study of the Impact of Line Edge Roughness on Metal Line Resistance using Virtual Fabrication

Back-End-of-Line (BEOL), Etch, Lithography and Patterning, Process Window Optimization, SEMulator3D

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