2018 SPIE Advanced Lithography Conference

Improving Patterning Yield at the 5 nm Semiconductor Node

By:  Benjamin Vincent, Ph.D., Staff Engineer, Semiconductor Process & Integration

Engineering decisions are always data-driven.  As scientists, we only believe in facts and not in intuition or feelings.

At the manufacturing stage, the semiconductor industry is eager to provide data and facts to engineers based upon metrics such as the quantity of wafers produced per hour and sites/devices tested on each of those wafers. The massive quantity of data generated in semiconductor manufacturing can provide facts that engineers can use to make immediate and accurate decisions, such as how they might correct any excursion or yield drift. Data exists, so life is (kind of…) easy! read more…

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