Directed self assembly may offer similar benefits to EUV, process modeling study says

By Luke Collins, Tech Design Forum

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Directed self assembly (DSA) techniques may offer similar advantages in terms of process variation control as EUV lithography, according to a study carried out using 3D behavioral process modeling techniques.

This could reduce fab cycle times, ease process integration and save costs in advanced semiconductor processes, especially for DRAMs, whose regular structures are well-suited to the use of DSA.

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Coventor ASML IMEC: The last half nanometer

By Scotten Jones, SemiWiki
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On Tuesday evening December 8th at IEDM, Coventor held a panel discussion entitled the “The Last Half Nanometer”. Coventor is a leading provider of simulation software used to design processes. This is my third year attending the Coventor panel discussion at IEDM and they are always excellent with very strong panels and discussion. The panel was made up of David Fried CTO of Coventor, Alek Chen from ASML, Aaron Theon of IMEC, and Subramanian Iyer from UCLA. Subramanian acted as both a panelist and the moderator.

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