February 27, 2023
Figure 1 contains physical drawings of a Disk Resonating Gyroscope. Figure 1(a) displays an isometric view of the layout, including the DRG body, grounded electrodes, and the input electrodes and sense electrodes for channels 1 and 2. Figure 1(b) shows a detailed view of the radial electrodes as an inset to Figure 1(a), displaying gaps, thicknesses and other dimensions in microns.
Published by Coventor at February 27, 2023
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Using Machine Learning to Develop a Real-Time Model of a MEMS Disk Resonating Gyroscope

                        Deep Learning Reduced Order Modeling to Predict Auto-Parametric Resonance                   […]
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October 27, 2022
Figure 1 - SEMulator3D® process flow for creating an airgap in a FinFET model. The visibility deposit step creates the airgap by pinching off the airgap at the top. The CMP step is then used to remove the excess nitride. Scale bar is 10nm. The airgap reduces the parasitic capacitance between gate and source/drain. The size of the airgap can be controlled by varying the etch depth, tilt and source sigma of the etching reagents.
Published by Sumant Sarkar at October 27, 2022
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Creating Airgaps to Reduce Parasitic Capacitance in FEOL

Reducing the parasitic capacitance between the gate metal and the source/drain contact of a transistor can decrease device switching delays. One way to reduce parasitic capacitance is to reduce the […]
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