September 21, 2022
Figure 2: MEMS+ modal simulation result of a Quad Mass Gyroscope model built using published designs [2]. This Gyroscope comprises two degenerate, anti-phase X- and Y-vibratory modes that can be used in whole-angle mode.

Modeling an Actual Foucault’s Pendulum – Design Implications for MEMS Gyroscopes

Introduction Conventional MEMS gyroscopes are miniaturized devices that measure angular velocity. The performance of current MEMS gyroscopes limits them to stabilization applications, due to bias, scale errors and noise.  If […]
July 29, 2022
Figure 1: Reverse Engineered Drawing of a STMicroelectronics Gyroscope (source: TechInsights)

How Can You Use a GDS Layout File to Quickly Create a Simulation Ready MEMS Model?

Creating a fully coupled multiphysics model is one of the holy grails of MEMS modeling. If you can automate the creation of a MEMS model, it opens the door to […]
June 10, 2022
MEMS+ model of a 3 axis Gyroscope that illustrates new MEMS+ features. The model is comprised of 4 flexible plates formed from two pairs of mirrored meshes attached to electrodes. These plates are displayed semi-transparently, to highlight the underlying electrodes  (Source:  Chipworks, "Motion sensing in the iPhone 4: MEMS Gyroscope". Y. Loke, STMicroelectronics, Semicon West 2013)

CoventorMP 2.1 is released!

We are pleased to announce the release of CoventorMP 2.1, which includes MEMS+ 7.1 and CoventorWare 11.1. New features streamline device creation and make simulation results easier to load and […]
May 19, 2022
Figure 1: The MEMS-based gravimeter is comprised of a DRIE etched silicon layer which is anodically-bonded to a partially etched glass wafer

Measuring Gravity using Gravimeters and MEMS

Paul A.M. Dirac, an English physicist famous for his work in quantum mechanics, once stated “Pick a flower on Earth and you move the farthest star.”  This statement may be […]
April 26, 2022
Figure 2: Schematic view of standard CMOS including an electro-mechanical switch monolithically integrated into BEOL [2].   Courtesy:  University of California, Berkeley

There is Plenty of Room at the Top: Imagining Miniaturized Electro-Mechanical Switches in Low-Power Computing Applications

The First Computers:  Electro-Mechanical Computing The first computers were built using electro-mechanical components, unlike today’s modern electronic systems. Alain Turing’s cryptanalysis multiplier and Konrad Zuse’s  Z2 were invented and built […]
March 29, 2022
Figure 2: Microphone parameters

Using Genetic Algorithms in MEMS Design

Introduction Genetic algorithms belong to a family of algorithms called “stochastic algorithms”.  These algorithms are used to find the optimal solution to a mathematically difficult real-world problem, such as the […]
February 15, 2022
Figure 2: Layout representation of ST Gyroscope (reverse engineered using TechInsights teardown)

3D Solid Model Creation using Process and Layout

What is 3D Solid Modeling? You’ve certainly heard of “3D Solid Modeling”.  The term first originated in the verification engineering community and has now become nearly ubiquitous. Mainstream industries like […]
January 19, 2022
Fig. 3. Block diagram of the multi-domain simulation. Courtesy of Waseda University, Professor Ikehashi laboratory.

Shaking Your World: Using MEMS Seismometers to Monitor Earthquakes

In any given year, we expect about 16 major earthquakes worldwide, 15 of which are in the magnitude 7 range and one in the magnitude 8.0 range or greater [1]. […]
December 14, 2021

Digital Twins for MEMS Product Development

A digital twin is a digital representation of a real-world item, and includes software objects or models that represents these real-world items.   In MEMS product development, digital twins (or software […]
November 18, 2021
Figure 1: Commercial True Wireless Stereo earbuds (Courtesy: Apple, Inc.).

Make your Voice Heard: The Latest Advances in MEMS Voice Sensors

In a previous blog post published in September 2020, I stated that MEMS microphone demand is being driven by customer-requested audio features such as stereo sound, voice recognition, sound directivity, […]
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