April 29, 2021
Figure 2: Piezoelectric µ-mirror

Overview of Piezoelectric MEMS: Principles, Applications and the Future

What is Piezoelectricity? Piezoelectricity is a property of certain materials to become electrically polarized under strain and stress. This phenomenon has been studied extensively since it was first discovered in […]
March 24, 2021
MEMS Blog Figure 1 Reverse engineered gyroscope, with suspension spring displayed in the call-out circle

Improving Your Understanding of Advanced Inertial MEMS Design

Micro-Electrical-Mechanical Systems (MEMS) based inertial sensors are used measure acceleration and rotation rate. These sensors are integrated into units to measure motion, direction, acceleration or position, and can be found […]
February 17, 2021

Why is MEMS+ a crucial new solution for teaching MEMS Design to the next generation of engineers

Guest Author: Jérôme Juillard, Ph.D., Professor, CentraleSupélec (Paris-Saclay University) Every year, I teach different aspects of sensors and MEMS design to about a hundred students.  The pupils range from first […]
September 14, 2020
Figure 2:  Double Backplate MEMS Microphone MEMS+ Model Example

An Explanation of New MEMS Microphone Technology and Design

What is a MEMS Microphone? MEMS (microelectromechanical systems) microphones are micro-scale devices that provide high fidelity acoustic sensing and are small enough to be included in a tightly-integrated electronic product. […]
June 26, 2020
Virtually every MEMS and sensor device inside the latest electronic products has been made using Lam Research equipment

Enabling Better MEMS from Concept to High Volume Manufacturing

Lam Research® is one of the top equipment suppliers in the semiconductor ecosystem. As a trusted, collaborative partner to the world’s leading semiconductor companies, Lam Research is a fundamental enabler […]
April 15, 2020
Co-simulation of the package and transducer

Cutting-Edge MEMS Process, Device and Simulation Technologies: IEEE MEMS 2020 Conference Review

The IEEE MEMS conference was held in Vancouver during January 2020. We attended the conference to meet with our customers and to see what new developments are being made in […]
February 20, 2020

The Next Technology Frontier in MEMS Gyroscopes

In MEMS technology development, it is always exciting to see the next technology frontier, the border of the known and the unknown. Talent and hard work (along with ingenuity) can […]
October 16, 2019

New Product Announcement – CoventorMP 1.2

We are very pleased to announce the release of our latest MEMS design software, CoventorMP 1.2. This release has been enriched to improve the accuracy of device models and extend the […]
April 18, 2019
Pressure Sensor (Courtesy: X-FAB)

EDA and Foundry Collaboration Speeds MEMS Sensor Design

New MEMS-based products are constantly emerging, fueled by the Internet of Things (IoT), autonomous driving, smart manufacturing and healthcare applications. The MEMS pressure sensor market is no exception to this […]
June 15, 2018
Coventor_June_2018_blog-Figure 1. Mode shape of a dual-axis micromirror

LiDAR: How MEMS is enabling the new trend in spatial sensing

You’ve probably heard a lot about LiDAR. It stands for Light Detection and Ranging, and it’s playing a central role in many emerging technologies like autonomous vehicles, robotics and home […]
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