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Fig.1. Bin illustration (a) Pass, (b) HR, (c) VML, (d) MML, (e) VMO, (f) VMS.

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Using failure bin classification, yield prediction and process window optimization to predict and enhance yield Device yield is highly dependent upon proper process targeting and variation control of fabrication steps, […]
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Lam Semiconductor Equipment

Controlling Variability using Semiconductor Process Window Optimization

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