Process Window Optimization

Controlling Variability using Semiconductor Process Window Optimization

By: Benjamin Vincent, Software Applications Engineer

Introduction

Courtesy:  Lam Research

To ensure success in semiconductor technology development, process engineers must set the allowed ranges for wafer process parameters. Variability must be controlled, so that final fabricated devices meet required specifications. These specifications include critical dimensions, electrical performance requirements, and other device characteristics. Pre-production or ramp-up production Si wafers, which are processed in the fab but not yet optimized, are the usual source of test data needed to understand and control this variability. read more…

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