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  • Pathfinding by process window modeling: Advanced DRAM capacitor patterning process window evaluation using virtual fabrication

    Read more - Pathfinding by process window modeling: Advanced DRAM capacitor patterning process window evaluation using virtual fabrication
    Figure 2. Virtual metrology results for minimum and maximum area.
    Pathfinding by process window modeling: Advanced DRAM capacitor patterning process window evaluation using virtual fabrication

  • Process Window Optimization of DRAM by Virtual Fabrication

    Read more - Process Window Optimization of DRAM by Virtual Fabrication
    Process Window Optimization of DRAM by Virtual Fabrication

  • A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM

    Read more - A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM
    wiggling AA figure
    A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM

  • Speeding Up Process Optimization with Virtual Processing

    Read more - Speeding Up Process Optimization with Virtual Processing
    Figure 1 Once the model is set up, it results in the capacitor contact as shown. At this point, electrical analysis can be undertaken and the edge effect of the capacitor investigated
    Speeding Up Process Optimization with Virtual Processing

  • Optimizing DRAM Development using Directed Self-Assembly (DSA)

    Read more - Optimizing DRAM Development using Directed Self-Assembly (DSA)
    Selection of steps of the SAQP process for patterning the 20-deg active area
    Optimizing DRAM Development using Directed Self-Assembly (DSA)

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