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The Value of Integrating Process Models with TCAD Simulation (and some tips on how to do it)

By: Shi Hao (Jacky) Huang, PhD, Semiconductor Process & Integration Engineer

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Nowadays, novel semiconductor technologies have brought complex process flows to the fab.   These process flows are needed to support the manufacturing of advanced 3D semiconductor structures. It can be helpful to model process flows, and their effect on a novel device, prior to physical fabrication.

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IEDM 2017 – December 4-6, 2017, San Francisco, CA

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