Coventor to Showcase Lithography Research at SPIE 2016

CARY, NC– February 8, 2016 – Coventor®, Inc., the leading supplier of virtual fabrication solutions for semiconductor devices and micro-electromechanical systems (MEMS), today announced it will be exhibiting at the SPIE Advanced Lithography Conference in San Jose, CA from February 21 – 25, 2016.   Coventor will highlight how its SEMulator3D virtual fabrication environment has been used to help understand and resolve issues in adopting new lithography technologies in its booth (#227) and in a series of technical papers.

Moving to EUV or alternate lithography technology is important for the industry, because it will enable chips to become smaller, faster and more functional.   Coventor’s contribution to this effort is in simulating new lithography processes to predict problems and provide insight into the potential implementation of these lithography technologies in high volume semiconductor manufacturing, without the time and expense of actual wafer fabrication. As it continues to get more difficult and more costly to move to smaller nodes, virtual fabrication is becoming a more critical tool for chipmakers.

Coventor and its customers have been using virtual fabrication to deepen the understanding of what’s required to incorporate new lithography technologies.   Coventor will present two papers related to this topic at SPIE 2016:

Predicting LER and LWR in SAQP with 3D virtual fabrication  (Interactive Poster Session)

  • Tuesday, 23 February 2016, 6:00 PM – 8:00 PM
  • Author(s): Jiangjiang Gu, Dalong Zhao, Vasanth Allampalli, Daniel Faken, Ken Greiner, David M. Fried, Coventor, Inc. (United States)
  • This paper demonstrates how to improve fabrication yield by reducing LER and LWR using process flows and integration techniques discovered via virtual fabrication.


Virtual fabrication using directed self-assembly for process optimization in a 14nm DRAM node  (Session 8:  DSA Modeling and Design)

  • Wednesday, 24 February 2016, 1:40 PM – 3:30 PM
  • Author(s): Mattan Kamon, Mustafa Akbulut, Yiguang Yan, Daniel Faken, Andras Pap, Vasanth Allampalli, Ken Greiner, David M. Fried, Coventor, Inc. (United States)
  • This paper describes using virtual fabrication to analyze the incorporation of advanced DSA (directed self-assembly) lithography processes in DRAM development.   This may be the first paper using virtual fabrication to look at the benefits of DSA processes vs. SAQP (self-aligned quadruple patterning).


The latest version of Coventor’s SEMulator3D Virtual Fabrication Platform enables process modeling for FinFETs, 3D NAND Flash, BEOL, Nanowires, 3D-IC, FDSOI, DRAM, and other next generation processes. In addition it includes modeling performance enhancements, a new GUI for the process editor and adaptive incremental rebuild capabilities.

About Coventor

Coventor, Inc. is the market leader in automated design solutions for developing semiconductor process technology, as well as micro-electromechanical systems (MEMS). Coventor serves a worldwide customer base of integrated device manufacturers, memory suppliers, fabless design houses, independent foundries, and R&D organizations. Its SEMulator3D modeling and analysis platform is used for fast and accurate ‘virtual fabrication’ of advanced manufacturing processes, allowing engineers to understand manufacturing effects early in the development process and reduce time-consuming and costly silicon learning cycles. Its MEMS design solutions are used to develop MEMS-based products for automotive, aerospace, industrial, defense, and consumer electronics applications, including smart phones, tablets, and gaming systems. The company is headquartered in Cary, North Carolina and has offices in California’s Silicon Valley, Waltham, Massachusetts, and Paris, France. More information is available at

Coventor and SEMulator3D are registered trademarks of Coventor, Inc. All other trademarks are the property of their respective owners.

Note to Editors: Digital images are available.

MEMS/IoT Program Manager – Paris, France (fr)

MEMS/IoT Program Manager – Paris, France (fr)

Nous recherchons une personne qualifiée pour rejoindre notre équipe d’ingénieurs basée à notre siège européen à proximité de Paris. Vous travaillerez dans un environnement international et collaborerez étroitement avec l’équipe développement et celle des ingénieurs d’application ainsi qu’avec les principales entreprises spécialisées dans le domaine des MEMS, les centres de R&D et les partenaires CAO.

Le candidat aura une expérience d’au moins 5 ans dans l’industrie orientée sur la conception d’ASIC analog/mixed-signal (A/MS) ou la conception MEMS utilisant les outils CAO. Vous avez une expérience pratique comme concepteur, responsable conception, ingénieur d’application, responsable produit ou membre ou responsable d’une équipe de CAO. Vous avez une très bonne connaissance des flots de conception analog/mixed-signal et de process design kits (PDK). Vos qualités en communications et votre habileté à construire des relations fortes avec les clients, les partenaires économiques ou avec les équipes internes sont solides et reconnues.


  • vous êtes l’interface avec les partenaires stratégiques (fabricants, fournisseurs CAO et centres de R&D) pour développer des solutions personnalisées, démonstrations, publications et autres offres permettant d’accroître l’activité commerciale ;
  • vous collaborez en interne avec les équipes de développement et les ingénieurs d’application pour créer des solutions qui mettent en avant nos partenaires stratégiques ;
  • vous participez au développement des PDKs pour MEMS basé sur les outils de Coventor et ses partenaires ;
  • vous gérez les projets de R&D sur fonds européens avec les partenaires externes ;
  • vous révisez et affinez la valeur de nos offres pour la conception des MEMS de l’internet des objets (IoT), l’intégration MEMS+IC et les PDKs pour MEMS ;
  • vous contribuez en parallèle au marketing technique.


  • master ou doctorat en génie électrique ou équivalent ;
  • très bonne compréhension des fondamentaux en circuit électrique ;
  • expérience d’au moins 5 ans dans l’industrie en lien direct avec la conception MEMS ou l’analog/mixed-signal ;
  • bon niveau d’utilisation des logiciels CAO, PDK inclus ;
  • très bonne compréhension des technologies de fabrication MEMS et/ou semi-conducteurs ;
  • expérience de langage de script tel que MATLAB, Python ou SKILL ;
  • excellent relationnel clients et/ou partenaires ;
  • très bon niveau de communication en anglais technique (écrit et oral). La connaissance d’une autre langue est un plus.

Nous offrons un poste à qualification élevée à la pointe de la haute technologie dans un contexte fortement international. Le salaire proposé sera fonction de la formation et de l’expérience. Ce poste est en CDI à plein temps et basé dans notre centre de développement européen situé à Villebon sur Yvette (Essonne) en région parisienne. Pour postuler, vous devez être un résident de l’Union Européenne ou avoir un titre de travail pour l’Europe. Si vous êtes intéressé par ce poste, envoyez-nous votre CV et votre lettre de motivation en anglais à l’adresse suivante:

Advanced Lithography and Process Variation Modeling Using SEMulator3D


Click on image to view animation of modeling

By:   Jimmy Gu, Coventor Technical Staff

One of the top and probably toughest challenges that process integrators are facing today in a silicon fab is process variability. As a former process integrator working hard to ramp up the yield of 22nm FinFET technology, I saw it first-hand. Looking back, I wish I was equipped with the SEMulator3D virtual fabrication platform, which is designed to address this type of process variability challenge. With the recent release of SEMulator3D 5.1, its process variability toolbox has just received a powerful new addition: the ability to model line edge roughness (LER) and line width roughness (LWR) in lithography.

Why is LER and LWR so relevant in state-of-the-art process technology? The continued scaling of transistor and interconnect feature size, and the introduction of 3D structures such as FinFETs and 3D NAND, has brought significant challenges to process control of key structural variation sources such as LER and LWR. These structural variations are typically introduced during a lithography process and carried through subsequent complex process integration schemes. The final end-of-line LER and LWR on the wafer can become yield limiting factors, by increasing transistor threshold voltage variations leading to SRAM read/write fails, or by reducing BEOL process margins causing open/shorts in interconnects. As a result, much effort has been placed on designing robust integration schemes and implementing new process changes to ensure healthy LER/LWR. Therefore, the ability to incorporate realistic LER/LWR modeling in lithography will add an important dimension of process variability that is needed to facilitate a process integrator’s day to day process development work.

As an example, I have recently worked on a test case with the SEMulator3D virtual fabrication platform, to find out how LER and LWR are carried through in a typical BEOL SAQP integration scheme. The goal of this study was to shine some light onto a few interesting questions:

1) How does etch and deposition alter LER on line edges respectively in a SAQP flow?

2) What is the frequency response of etch and deposition effects on LER?

3) What process factors determine the final LWR of the trenches?

4) How can one reduce LER and LWR?

In this work, the initial LER was applied through lithography. Using a random line generation algorithm, noise of characteristic wavelengths and amplitudes were superimposed to form exposure edges with the expected LER. The LER and LWR after each process was measured using advanced virtual metrology.  By carefully analyzing the virtual experiment data that was similar to data that might be gathered from a real fab, we’ve discovered a number of interesting results.   These results will be disclosed in a 2016 SPIE Advanced Lithography poster entitled “Predicting LER and LWR in SAQP with 3D virtual fabrication” (Paper 9782-22 in the Advanced Etch Technology for Nanopatterning Session). Please come to this informative poster session.   I am excited to explain and discuss this work in greater detail !

In the latest release of SEMulator3D 5.1, LER/LWR is fully integrated into our lithography engine by applying random noises on lithography line edges. The noise is characterized by RMS amplitude and correlation length following Fourier Synthesis techniques. Random edge noise can be applied in addition to any other lithography variability parameters such as CD bias and mask shifts, capturing most of the variation sources associated with a lithography process. I believe that the new LER modeling capabilities in SEMulator3D will generate many valuable use cases, helping engineers tackle the toughest process variation challenges.

MEMS/IoT Program Manager– Paris, France

MEMS/IoT Program Manager– Paris, France

We are seeking a uniquely qualified individual to join the outstanding engineering team in our European headquarters located near Paris. Working in an international environment, you will collaborate closely with our Product Development and Application Engineering teams as well as leading MEMS companies, R&D centers and electronic design automation (EDA) partners.

The ideal candidate will have at least 5 years of industry work experience focused on analog/mixed-signal (A/MS) ASIC design or MEMS design using commercial EDA tools. You had a hands-on role as a designer, design manager, EDA field support engineer, product manager, or corporate CAD team member or manager. You are very familiar with analog/mixed-signal design tools flows and process design kits. You are a highly collaborative individual with strong communication skills who has a proven track record of building trustful relationships with customers, partners and internal teams.


  • Interface with strategic partners, including foundries, EDA vendors, and R&D centers to develop customized solutions, demonstrations, publications, and other offerings that will be mutually beneficial for business growth
  • Collaborate inside Coventor with development and application engineering to create solutions that advance our strategic partnerships
  • Participate hands-on in developing MEMS process design kits (PDKs) based on Coventor and partner tools
  • Manage EU-funded R&D projects with external partners
  • Review and refine the value proposition for our current offerings for MEMS design for IoT, MEMS+IC integration and MEMS Process Design Kits (PDKs)
  • Contribute to technical marketing collateral


  • MS or PhD degree in Electrical Engineering or related field
  • Strong understanding of electrical circuit fundamentals
  • At least 5 years of industry work experience directly related to analog/mixed-signal or MEMS design
  • Advanced user of commercial EDA tools and design flows, including as a user or developer of PDKs
  • Good understanding of semiconductor and/or MEMS fabrication technologies
  • Hands-on experience with a scripting language such as MATLAB, Python or SKILL
  • Evidence of building strong relationships with customers and/or external partners
  • Excellent English communication skills (verbal and written). Knowledge of other languages is a plus.

We offer a challenging position in a leading-edge, high-tech environment with many international contacts. Compensation will be commensurate with education and experience. This regular, full-time position is based in our European development center, located in Villebon sur Yvette, near Paris, France and requires some travel. You must be a current legal resident of the EU or have a valid EU visa to apply for this position. If you are interested in this opportunity, e-mail your CV and cover letter in English to

Marketing Coordinator – Waltham, MA

Marketing Coordinator – Waltham, MA

Coventor provides highly advanced design automation and process modeling solutions used to invent the next generation of intelligent electronics. We solve real-world design, process development and integration problems for the semiconductor and MEMS (micro electromechanical system) industries. Our products have been used in the design of smart phones, automobiles, tablet computers and many of the electronic devices that are present throughout your everyday life. Coventor is helping to build a connected world of electronic devices (the “Internet of Things”) that will improve the productivity and quality of life worldwide.

Coventor is seeking a marketing coordinator interested in the marketing of advanced technology products. As a key member of our marketing department, you will be involved in the planning and coordination of every aspect of our marketing efforts, including trade show execution, production of marketing collateral, marketing campaigns, customer analytics and many other aspects of our product marketing efforts. You will be part of a small, collaborative, experienced marketing team promoting innovative software tools and solutions for the semiconductor and MEMS manufacturing industries. Your title, level of responsibility, creative freedom and salary will be commensurate with your education, experience and initiative.

Coventor offers a full benefit package, including competitive salaries, paid health insurance and other company-paid benefits.

Responsibilities include:

  • Trade show execution:   Assist with and help manage trade show planning, logistics, implementation and coordination.
  • Marketing collateral:  Coordinate, review, update and assist with production and distribution of marketing collateral, including website content, trade show material, marketing literature and advertising pieces.
  • Social media and website:   Assist with reporting and management of website and social media campaigns, including SEO management, website editing, social media tracking and posting support.
  • Email campaigns:  Responsible for maintaining and acquiring internal and external email addresses, along with use of HubSpot and other email marketing tools to execute and monitor planned email campaigns.
  • Marketing campaigns and product launch:  Support and assist with preparation and delivery of marketing campaigns and product launch activities.
  • Public relations:   Assist with logistics for planned public relations activities.
  • Meetings and webinars:   Assist with meeting and webinar coordination, planning, communications, attendee tracking and other requested activities.
  • Customer segmentation and analytics:  Use Coventor’s CRM system to enter customer demographic data, generate email lists for marketing campaigns and generate analytic reports.
  • Competitive and market research:   Support marketing management in competitive and market research.

Required Qualifications:

  • Bachelor degree in Business, Communications, Marketing or a similar degree.
  • Excellent communications skills, both written and oral.
  • Excellent organizational skills and highly detail oriented.
  • Ability to perform multiple tasks at once and complete them in a timely and competent manner.
  • Able to work in a collaborative environment.
  • Proficiency in Excel, Word, Outlook and PowerPoint required.

Experience in any of the following would be a bonus:

  • Trade show and event organization experience.
  • Background in using social media tools, including Twitter and LinkedIn.
  • Background, knowledge and/or certification in HubSpot, Constant Contact, Marketo or other email marketing platform.
  • Background and knowledge in CRM (customer relationship management) systems such as, NetSuite or other CRM platforms.
  • Experience in WordPress website content management or basic HTML.
  • Basic knowledge of SEO (search engine optimization) and keyword analysis.

This regular, full-time position is located in Waltham, MA. Coventor offers comprehensive benefits and is an EEO/AA Employer. You must be a current legal resident of the U.S. or have a valid U.S. visa to apply for this position. Please e-mail your cover letter and resume to

Field Sales Representative, Engineering Software – Waltham, MA

Field Sales Representative, Engineering Software
– Waltham, MA

Do you have strong sales aptitude with a minimum of 3 years success in B2B selling of high-tech products, software, or services? Do you enjoy engaging with highly-trained engineers, researchers and university faculty, understanding their needs, and selling them appropriate solutions? Are you an outgoing, self-motivated, organized professional with a strong work ethic? Join our outstanding collaborative team and take responsibility for North America universities and assigned commercial/government accounts. Your compensation will include a competitive base salary and benefits, and a commission plan

Job Responsibilities

  • Manage and grow our existing business of supplying software tools for MEMS design to North America universities
  • Establish and maintain relationships with current and prospective customers, engaging by phone and internet with periodic customer visits
  • Explain high-level strengths and value of Coventor solutions to prospects
  • Perform all aspects of sales process, including prospecting, arranging meetings, coordinating evaluations, quoting, negotiating, closing, and post-sales follow-up
  • Prioritize activities so as to meet or exceed sales bookings objectives
  • Communicate and coordinate account strategy and tactics with technical support engineers, sales operations and senior management
  • Report regularly on sales activities and provide accurate forecasts
  • Collect and maintain contacts and account records in our CRM system and use the system to generate proposals and forecast your sales pipeline.
  • Participate and support marketing events to advance the Coventor brand and sales including, as needed participation in trade shows, conferences and events.

Required Qualifications

  • Bachelor’s degree in an engineering discipline or bachelor’s degree and highly relevant sales experience
  • Minimum 3 years of experience in B2B sales of high-value products or services as an Account Manager, Sales Associate, or Inside Sales Rep with a record of success
  • Skilled in use of Microsoft Office, on-line resources, and web-based applications
  • Excellent English communication skills, both verbal and written
  • Proven, documented ability to meet and exceed sales quotas

Desirable Qualifications

  • Experience selling engineering or scientific software, such as electronic design automation (EDA) or computer-aided engineering (CAE) software solutions
  • Experience selling to PhD-level engineers or university faculty
  • Knowledge or experience in semiconductor or MEMS technologies
  • Experience using a customer relationship management (CRM) system

This regular, full-time opening requires regular, on-site presence in our Waltham, MA office and up to 50% travel. You must be a current legal resident of the U.S. or have a valid U.S. visa to apply for this position. Coventor offers comprehensive benefits and is an EEO/AA Employer. Please email your cover letter and resume to

Senior Software Engineer, 3D Modeling in C++ – Waltham, MA

Senior Software Engineer, 3D Modeling in C++ – Waltham, MA

Coventor, Inc. is seeking a software engineer with significant C++ experience. As a key member of our modeling engine team, you will extend and improve our software, working with others to implement new physics-based 3D modeling algorithms while keeping the code modular, reusable and efficient. You will join a collaborative, highly skilled software development team working on our innovative software tools and solutions for the semiconductor and MEMS manufacturing industries. Our software uses unique, highly efficient numerical modeling and simulation techniques to perform virtual fabrication of state-of-the-art semiconductor and MEMS devices. This is a hands-on software development position, requiring proficiency in C++. Your title, level of responsibility, creative freedom and salary will be commensurate with your education and experience.

Responsibilities include:

  • Collaborate to implement new 3D modeling algorithms for semiconductor fabrication processes in our C++ modeling engine.
  • Extend and maintain our generic, C++ template-based modeling framework.
  • Optimize modeling algorithms for speed, including profiling and parallel implementation.
  • Participate in requirements gathering, specification and verification.
  • Contribute to the overall software product, including application infrastructure, GUI and Python scripting APIs.
  • Participate in general software engineering tasks, including verification, testing, bug fixing and maintenance of existing code.

Required Qualifications:

  • BS in Engineering, Physics, Computer Science or a related field. Advanced degree is a plus.
  • Minimum of 4 years work experience in commercial software development.
  • Expert level C++ skills, including implementation of template classes and/or template meta-programming.
  • Experience with 3D modeling algorithms (voxels, meshes, geometry, graphics).
  • Demonstrated ability to design and implement clean, well-organized production code.
  • Working knowledge of object oriented design principles.
  • Desire to collaborate, contribute to, and learn from a team.

Experience in any of the following would be a bonus:

  • General knowledge of semiconductor processing technology.
  • Exposure to numerical algorithms (finite differences, etc.).
  • Experience with cross-platform development, on Windows and Linux.
  • Experience with one or more of: Boost, STL, C++11 or later, Python.

This regular, full-time position is located in Waltham, MA. Coventor offers comprehensive benefits and is an EEO/AA Employer. You must be a current legal resident of the U.S. or have a valid U.S. visa to apply for this position. Please e-mail your cover letter and resume to

Senior Software Engineer, UI and Infrastructure – Waltham, MA

Senior Software Engineer, UI and Infrastructure – Waltham, MA

Do you have a passion for crafting elegant solutions to programming challenges? Do you enjoy software design, architecture and working with other engineers? If so, Coventor needs your contributions to our 3D modeling and visualization application. You will join a truly collaborative, highly skilled development team and will contribute to both design and implementation. Our semiconductor process modeling software is revolutionizing the way that leading chip manufacturers around the world develop advanced fabrication processes. In contrast to working in large organizations, your contributions will make a difference; your tasks will cover a broad scope and will be crucial to the success of our product.

Responsibilities include:

  • Participate in ground-up re-engineering of our application with a new modular, extensible C++ object-oriented architecture
  • Work with and improve on our generic C++ template-based application framework
  • Implement new software features in C++ and Python, including unit testing
  • Participate in our Agile software development process
  • Possibility to contribute to 3D visualization, modeling algorithms, and many other software areas appropriate to your talents and goals

Required Qualifications:

  • BS or MS in Computer Science or a related discipline
  • Minimum 3 years of experience in a professional software development environment
  • Strong C++ coding skills, including a working knowledge of the STL
  • Aptitude for object oriented design
  • Experience implementing user interfaces with Qt, GTK+, wxWidgets or similar cross-platform frameworks
  • Willingness to collaborate, contribute to, and learn from a team
  • Ability to learn new technologies and solve problems effectively

Experience in the following areas would be a bonus:

  • Expert level knowledge of Linux is a strong plus
  • Commercial software development experience with Python
  • Application development in scientific simulation or visualization
  • Experience in distributed computing
  • Experience developing cloud-based software applications
  • Experience with OpenGL and/or 3D visualization

This regular, full-time position is located in Waltham, MA. Coventor offers comprehensive benefits and is an EEO/AA Employer. You must be a current legal resident of the U.S. or have a valid U.S. visa to apply for this position. Please e-mail your resume to