A new and very comprehensive book on MEMS design is now available, and we are proud to point out that a couple of Coventor MEMS experts have provided the first chapter.
This practical handbook fills a gap in the literature available on advanced micro and nanosystems. It addresses the three most important approaches of system-level modeling:
1) physical modeling with lumped elements and Kirchhoffian networks, 2) modal modeling to accurately describe the mechanical domain, and 3) mathematical modeling employing, for example, model-order reduction methods.
Editors and authors from industry and research discuss the physical and mathematical underpinnings and methods of MEMS modeling in a clearly understandable and sufficiently detailed manner. Tailored to practitioners and engineers, authors present the advantages and pitfalls of each method — and how to avoid the latter – so readers can choose the method most suitable for their specific application requirements.
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Steve Breit 