Coventor Blog

Package-Level Integration of MEMS in IoT Devices

csr-logoBy  Dr. Stephen Breit | Vice President of Engineering, Coventor

ChipScale Review September – October 2015

The trend of integrating heterogeneous technologies at the package level is now well underway, and includes MEMS sensors. Heterogeneous package-level integration arguably reached a new level with the release of the Apple Watch. A Chipworks teardown shows more than 30 die in Apple’s S1 package. Curiously, among the few components that are not included in the S1 package are a MEMS inertial measurement unit (IMU) by ST Microelectronics and MEMS microphones by Knowles. Surely Apple and other IoT device makers will strive to achieve higher-density, package-level integration of MEMS sensors in the future, but will need to overcome specific packaging challenges associated with MEMS.

read full article or download and view the pdf here



MEMS Executive Congress – November 4 – 6, 2015, Napa, CA

MEMS Executive Congress US 2015The MEMS Executive Congress brings together industry experts as they break down the challenges and opportunities of the MEMS and sensors industry. MEMS Executive Congress is the only MEMS & Sensors event where executives have the opportunity to talk shop, make deals, engage with competitors, and relax with colleagues – all in one place. Coventor is sponsoring the post-dinner cocktail reception.

VP of Business Development Blog

By Dinesh Bettadapur
July 2015

I was recently promoted to the Coventor executive management team as VP of Business Development assuming primary responsibility for driving business strategy and growth across the global semiconductor equipment market while also continuing to focus on driving market share growth across the Western US for the memory & logic IDMs as well as validation of the business potential for the fabless IC market.
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SEMulator3D 5.0 – It’s ALMOST HERE!!!!

By David M. Fried

I said I’d follow up with another blog about new features and capabilities SEMulator3D 5.0… and I’m running out of time. The Gold release is less than a week away!!
In the last blog, I gave a general overview of the new release and I talked about the all new dopant-handling capabilities, so let’s just jump right into another topic…Visibility!
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Collaboration Brings Fast Analysis to Acoustic Resonator Design

By Mattan Kamon

After some lively conversations with the top researchers in MEMS acoustic resonators during the 2014 Sensors and Actuators Workshop (familiarly known to the MEMS community as “Hilton Head”) we were motivated to develop a simulation solution that would better serve these researchers as well as commercial designers. With the recent release of CoventorWare 10, we introduced a new fast analysis capability for acoustic resonators that is unique in the industry and I’m excited to blog about it here.
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Don’t miss new Cloud-Based 3D Design-Technology Checking (3D-DTC) demo at DAC!

DAC 2015 is in full swing in San Francisco this week, and Coventor is there again. But this year, we’re also doing a special joint demonstration with Silicon Cloud International. This demonstration combines the power of Coventor’s SEMulator3D Virtual Fabrication platform with broad parallel computing offered by Silicon Cloud to produce a whole new capability that we call “3D Design-Technology Checking” or 3D-DTC for short (not DRC!).
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SEMulator3D 5.0 – It’s COMING!!!

David M. Fried

This is my favorite part of the year at Coventor: We’re about to do another MAJOR release of SEMulator3D. Developers are sprinting to the finish line, customers are clamoring for the newest features. I’d like to start talking about the new features of SEMulator3D 5.0, but one blog certainly won’t cover it all. Let’s get started, and we’ll do this as many times as we need to get it all written down.
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MEMS System Co-Design at DTIP

By Gerold Schröpfer

The 17th edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2015) took place this year in Montpellier, Southern France, on April 28-30. This conference brings together participants interested in MEMS fabrication with those interested in design tools and methods. While this annual event is always located in Southern Europe, it attracts attendees from both industry and academia from around the world.

It was my pleasure to chair a session titled Co-design for MEMS-based Smart Systems. In recent years, Coventor has made several crucial advancements, now embodied in MEMS+®, to bridge the gap between MEMS device design and system-level simulation. A number of MEMS+ users presented co-simulation results for systems that included inertial sensors, resonators, varactors and micromirrors. It was impressive and gratifying to see their achievements and hear their enthusiasm.

  • Guilherme Brondani Torri of imec presented the co-design of a MEMS-CMOS autonomous switched oscillator. He investigated how the dynamic response is affected by the operating point and environmental parameters. The co-simulation of MEMS and circuitry made it possible to identify important issues related to the stability of the proposed oscillator. [1]
  • Gaelle Lissorgues of ESSIE talked about a complete system design for an RF tunable agile filter. The parametric MEMS+ models for MEMS varactors and switches allowed optimizing the design with respect to manufacturing variations. Automated transfer of the MEMS+ model into Verilog-A allows for system-level simulation in ADS including RF performance estimation.[2]
  • Alessandro Sanginario of IIT Torino presented a MEMS+ based methodology for MEMS-IC-package co-design. The methodology takes into account the effects of thermally-induced stress on the package on inertial sensor transient behavior. He stated that, being an electronic designer, “it’s fantastic” to have a MEMS-package model in your familiar simulation language. [3, 4]
  • Fabio Cenni of ST Micro discussed a new extension to SystemC for MEMS system analysis, named SystemC-AMS/MDVP (Analog/Mixed Signal/Multi-Domain Virtual Prototyping) . This allows co-simulating not only MEMS with electronic hardware, but also with control software. The approach supports different levels of abstraction which allows balancing accuracy and simulation time. Fabio’s presentation was accompanied by a poster, written by Benoit Vernay of Coventor, demonstrating a prototype for automated extraction of a SystemC-AMS reduced-order models from MEMS+. [5, 6, 7]

Finally, my personal favorite was an invited presentation by Johannes Eisenmenger of Carl Zeiss. From a system-integrator point of view, he discussed the opportunities and challenges for EDA tools in developing optical systems. Optimizing such systems with suitable behavioral models is an essential step toward developing products for which new MEMS and other components need to be developed in parallel and their individual specifications depend on mutual interactions and environmental influences. One prominent example is the MEMS mirror matrix, FlexRay, employed in ASML’s 193nm UV lithography equipment for advanced CMOS. [8]

I want to warmly thank our customers for sharing their work with the MEMS system community.

MEMS-CMOS Autonomous Switched Oscillator presented by Guilherme Brondani Torr (© imec) [1]

MEMS-CMOS Autonomous Switched Oscillator presented by Guilherme Brondani Torr (© imec) [1]

Agile Filter assembly using MEMS switches and varactors presented by Gaelle Lissorgues [2]

Agile Filter assembly using MEMS switches and varactors presented by Gaelle Lissorgues [2]

MEMS-Package Co-Design presented by Alessandro Sanginario (© IIT, ST, Coventor) [3]

MEMS-Package Co-Design presented by Alessandro Sanginario (© IIT, ST, Coventor) [3]

Proceedings of International Conference on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP), Montpellier, France, 27-30 April 2015
[1] Guilherme BRONDANI TORRI (imec / KU Leuven – Belgium), Jan BIENSTMAN, Xavier ROTTENBERG, Harrie TILMANS (imec) ea, Co-Design of a MEMS-CMOS Autonomous Switched Oscillator
[2] Gaelle LISSORGUES (ESIEE Paris – France), Pierre NICOLE (THALES Systèmes Aéroportés – France), Julien PAGAZANI (ESIEE – France) ea, A RF tunable Agile Filter: from component to system design
[3] Alessandro SANGINARIO (Istituto Italiano di Tecnologia – Italy), Sarah ZERBINI (STMicroelectronics – Italy), ea, New design methodology for MEMS-electronic-package co-design and validation for inertial sensor systems
[4] Michelangelo GROSSO (ST-POLITO – Italy), Giuliana GANGEMI, Salvatore RINAUDO (STMicroelectronics – Italy) ea, Enabling Smart System Design with the SMAC Platform
[5] Olivier GUILLAUME, Fabio CENNI (STMicroelectronics – France) ea.,SystemC-AMS/MDVP-based modeling for the virtual prototyping of MEMS applications
[6] Fabio CENNI STMicroelectronics – France) ea, Generation of user-defined input stimuli for virtual prototyping of MEMS sensors applications
[7] Benoit VERNAY, Arnaud KRUST (Coventor – France), ea, SystemC-AMS Simulation of a Biaxial Accelerometer based on MEMS Model Order Reduction
[8] Johannes Eisenmenger, Opportunities and challenges of Electronic Design Automation of MEMS-ASIC Systems – A system integrator’s perspective (INVITED)