By Dr. Joost van Kuijk, Coventor
Microelectromechanical systems (MEMS) are micro-scale or nano-scale devices. Typically, they’re fabricated in a manner similar to integrated circuits (ICs) to exploit the miniaturization, integration, and batch processing benefits of semiconductor manufacturing. Yet unlike ICs, which consist solely of electrical components, MEMS devices combine technologies from multiple physical domains. They may contain electrical, mechanical, optical, or fluidic components.