by Paul McLellan
One of Coventor’s flagship products is SEMulator3D, and at Semicon West they announced a new version, 2014.100.
SEMulator3D is a powerful 3D semiconductor and MEMS process modeling platform. It uses highly efficient physics-driven voxel modeling technology. It models the physical effects of process steps, which is where all the current challenges are.
Combining the two-dimensional design layout with the process description gives it the capability to model the process flows and determine what will be manufactured with that combination of layout and process. The basic idea, as with all modeling, is to enable experiments to be done quickly and efficiently. Since the alternative is to actually build chips and then take measurements, which is millions of dollars of investment and months of delay, the virtual fabrication route is especially attractive. This is especially important in the early stages of process development since it can drastically shorten the whole development and ramp to volume roadmap.
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