Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance Using Virtual Fabrication
September 14, 2021
Using Process Modeling to Enhance Device Uniformity during Self-Aligned Quadruple Patterning
October 27, 2021We are very pleased to announce the release of our latest MEMS design software, CoventorMP® 2.0! With the new release, automated parametric design variation for simulation in both MEMS+® and CoventorWare® has never been easier. CoventorMP 2.0 includes scriptable transfer of fully preprocessed models from MEMS+ to CoventorWare for parametric analysis, enhanced device construction and modeling capabilities in MEMS+, and an improved user experience via updated GUI capabilities in both MEMS+ and CoventorWare.
Parametric model creation for CoventorWare has arrived
Preprocessed meshed models in MEMS+ can now be transferred via scripting to CoventorWare for parametric analysis. With CoventorMP 2.0, it is now possible to take full advantage of the scriptable parametric design capabilities of MEMS+. Meshed models can be automatically created in MEMS+ during parametric design studies, and quickly transferred to the powerful FEA/BEM solvers of CoventorWare. A scripting console is also available in CoventorWare to analyze the multiple MEMS+ models generated.
Enhanced Device Construction and Modeling Capabilities in MEMS+
One of the major upgrades of this release is a new MEMS+ enhancement to offer more efficient design with meshed plates. Advancing the powerful automatic meshing capabilities introduced in MEMS+ 6.5, the MEMS+ Wizard can now automatically connect a meshed plate with adjacent components, such as beams and combs. Model construction is greatly simplified as the Wizard will imprint surfaces of touching components onto a meshed plate and create mechanical connectors associated with the imprinted surfaces, and join coincident mechanical connectors. These capabilities can be used to quickly model many kinds of MEMS devices that include plates, beams and comb-based structures.
We’ve also added a new movable “side-gap” component, to enable the modeling of electrode, contact and/or squeezed-film damping acting between two moving in-plane components. The Movable Side Gap is an ideal component for designing flexible lateral overload stoppers, such as in-plane soft-landing contact structures in inertial sensors. In addition, exposed electrical connectors can now be designated as charge sources, in addition to the currently available Voltage Source designation. This new electrical source type in MEMS+ supports valuable new design capabilities, including MEMS microphone design using charge bias simulation in MEMS+ Simulator and MATLAB.
Improved User Experience with an Updated Interface and Additional Platform Support
A new ToolTips feature has been added to MEMS+, that provides information, warnings, and error notifications directly in the user interface. This real-time software feedback greatly improves design modeling, simulation efficiency and usability. The CoventorWare graphical user interface and visualizers have also been updated and upgraded, to modernize both analysis setup as well as result visualization. Finally, we’ve also added MEMS+ Support for MATLAB Scripting and Simulink on Linux, including support for Red Hat Enterprise Linux 7.5 with MATLAB versions 2020a and 2020.
For more information about this new release, or how to take advantage of these new capabilities, please contact us.
![Fig. 2. Silicon spin qubit centered in the dotted circle, control and readout signals (M, P, R, T, and Q) are shown in the inset. Simplified schematics of the quantum point contact and corollary circuits are shown. The voltage source is implemented as a digital-to-analog converter at room temperature. (Taken from [6])](https://www.coventor.com/wp-content/uploads/2022/05/Fig.-2.-Silicon-spin-qubit-centered-in-the-dotted-circle-control-and-readout.png)
![Figure 2: Schematic view of standard CMOS including an electro-mechanical switch monolithically integrated into BEOL [2]. Courtesy: University of California, Berkeley](https://www.coventor.com/wp-content/uploads/2022/04/Figure-2-April-2022-MEMS-Blog-for-Coventor-website.png)
