MEMS-CMOS Autonomous Switched Oscillator presented by Guilherme Brondani Torr (© imec) [1]
The 17th edition of the Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP 2015) took place this year in Montpellier, Southern France, on April 28-30. This conference brings together participants interested in MEMS fabrication with those interested in design tools and methods. While this annual event is always located in Southern Europe, it attracts attendees from both industry and academia from around the world.
It was my pleasure to chair a session titled Co-design for MEMS-based Smart Systems. In recent years, Coventor has made several crucial advancements, now embodied in MEMS+®, to bridge the gap between MEMS device design and system-level simulation. A number of MEMS+ users presented co-simulation results for systems that included inertial sensors, resonators, varactors and micromirrors. It was impressive and gratifying to see their achievements and hear their enthusiasm.
Finally, my personal favorite was an invited presentation by Johannes Eisenmenger of Carl Zeiss. From a system-integrator point of view, he discussed the opportunities and challenges for EDA tools in developing optical systems. Optimizing such systems with suitable behavioral models is an essential step toward developing products for which new MEMS and other components need to be developed in parallel and their individual specifications depend on mutual interactions and environmental influences. One prominent example is the MEMS mirror matrix, FlexRay, employed in ASML’s 193nm UV lithography equipment for advanced CMOS. [8]
I want to warmly thank our customers for sharing their work with the MEMS system community.
Proceedings of International Conference on Design, Test, Integration and Packaging of MEMS and MOEMS (DTIP), Montpellier, France, 27-30 April 2015
[1] Guilherme BRONDANI TORRI (imec / KU Leuven – Belgium), Jan BIENSTMAN, Xavier ROTTENBERG, Harrie TILMANS (imec) ea, Co-Design of a MEMS-CMOS Autonomous Switched Oscillator
[2] Gaelle LISSORGUES (ESIEE Paris – France), Pierre NICOLE (THALES Systèmes Aéroportés – France), Julien PAGAZANI (ESIEE – France) ea, A RF tunable Agile Filter: from component to system design
[3] Alessandro SANGINARIO (Istituto Italiano di Tecnologia – Italy), Sarah ZERBINI (STMicroelectronics – Italy), ea, New design methodology for MEMS-electronic-package co-design and validation for inertial sensor systems
[4] Michelangelo GROSSO (ST-POLITO – Italy), Giuliana GANGEMI, Salvatore RINAUDO (STMicroelectronics – Italy) ea, Enabling Smart System Design with the SMAC Platform
[5] Olivier GUILLAUME, Fabio CENNI (STMicroelectronics – France) ea.,SystemC-AMS/MDVP-based modeling for the virtual prototyping of MEMS applications
[6] Fabio CENNI STMicroelectronics – France) ea, Generation of user-defined input stimuli for virtual prototyping of MEMS sensors applications
[7] Benoit VERNAY, Arnaud KRUST (Coventor – France), ea, SystemC-AMS Simulation of a Biaxial Accelerometer based on MEMS Model Order Reduction
[8] Johannes Eisenmenger, Opportunities and challenges of Electronic Design Automation of MEMS-ASIC Systems – A system integrator’s perspective (INVITED)