Figure 2: Four SEMulator3D software images and three 3D models are shown in this figure. Figures 2(a)-(d) display images taken from SEMulator3D with line edge roughness modeling options within the software (left, top right and center). (a) In order to achieve surface roughness, an etch step with “Custom Loading Map” option can be used (upper left). (b-d) A custom Python step creates a .csv file that contains the etch depth at each point on the surface (center left and upper right figures) . Figure 2(e) displays three 3D models of surface roughness generated by the SEMulator3D software. The resulting surface roughness is shown in a 3D model of surface roughness for various roughness settings . Results for different values of the parameters are shown in Figure 3.