IEDM: Coventor Panel on BEOL Challenges

By Paul McLellan

At the recent IEDM in San Francisco, Coventor organized a panel titled BEOL Barricades: Navigating Future Semiconductor Yield, Reliability, and Cost Challenges. The BEOL, back end of line, is the metal, although where it begins and ends, as you will see, is debatable.

The panel was moderated by Ed Sperling and the panelists were:

  • Paul Besser of LAM Research
  • Chih-Chien Liu of UMC
  • Craig Child of GLOBALFOUNDRIES
  • Anton deVilliers of Tokyo Electron
  • David Fried of Coventor


read the full article here.

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