Figure 1: Top-Down View of Virtual-Model Experimental Runs. Each run (A, B and C) has different experimental conditions. A) Large memory cell hole size, no wordline rail, and voids enabled in the model. The voids in the wordlines are shown in red, with the voids creating a pinch-off caused by the small distance between the memory cell holes. B) Large memory cell hole size, nominal wordline rail distance, and voids disabled in the model. C) Nominal memory cell hole size, nominal wordline rail distance. The nominal wordline rail distance is illustrated in Image C.

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