October 2, 2023Published by Sandra Liu at October 2, 2023Categories Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Process Modeling Exploration for 8 nm Half-Pitch Interconnects
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Pathfinding by process window modeling: advanced dram capacitor patterning process window evaluation using virtual fabrication
October 2, 2023Published by Sandra Liu at October 2, 2023Categories New Techniques to Analyze and Reduce Etch Variation
October 2, 2023Published by Sandra Liu at October 2, 2023Categories N7 FinFET Self-Aligned Quadruple Patterning Modeling
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Modeling of Tone Inversion Process Flow for N5 Interconnect to Characterize Block Tip to Tip
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Modeling of Cross Wafer Induced Process Variations
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Investigation of 3D Photoresist Profile Effect in Self-Aligned Patterning through Virtual Fabrication
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Integrating process modeling with device simulation to predict device electrical performance
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Innovative Solutions to Increase 3D NAND Flash Memory Density
