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  • Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle

    Read more - Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle
    Fig. 4. Model calibration based on TEM cross sections for (a) fin self-aligned double patterning, (b) source/drain epitaxial growth and contacts, and (c) gate-to-source/drains spacers.
    Process Variation Analysis of Device Performance Using Virtual Fabrication: Methodology Demonstrated on a CMOS 14-nm FinFET Vehicle
  • Process Window Optimization of DRAM by Virtual Fabrication

    Read more - Process Window Optimization of DRAM by Virtual Fabrication
    Process Window Optimization of DRAM by Virtual Fabrication
  • Process Model Calibration: The Key to Building Predictive and Accurate 3D Process Models

    Read more - Process Model Calibration: The Key to Building Predictive and Accurate 3D Process Models
    Process Model Calibration: The Key to Building Predictive and Accurate 3D Process Models

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