October 2, 2023Published by Sandra Liu at October 2, 2023Categories Virtual fabrication using Directed Self-Assembly for process optimization in a 14nm DRAM
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Virtual Fabrication and Advanced Process Control Improve Yield for SAQP Process Assessment with 16 nm Half-Pitch
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Understanding the Effect of Variability in Bulk FinFET Device Performance
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Virtual fabrication using directed self-assembly for process optimization in a 14-nm dynamic random access memory
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Speeding Up Process Optimization using Virtual Fabrication
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Self-aligned quadruple patterning tomeet requirements for fins with high density
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Self-aligned Fin Cut Last Patterning Scheme for Fin Arrays of 24nm Pitch and Beyond
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Self-Aligned Block and Fully Self-Aligned Via for iN5 Metal 2 Self-Aligned Quadruple Patterning
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Review of virtual wafer process modeling and metrology for advanced technology development
October 2, 2023Published by Sandra Liu at October 2, 2023Categories Process Window Optimization of DRAM by Virtual Fabrication
