October 2, 2023
Published by Sandra Liu at October 2, 2023
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Virtual fabrication using Directed Self-Assembly for process optimization in a 14nm DRAM

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Virtual Fabrication and Advanced Process Control Improve Yield for SAQP Process Assessment with 16 nm Half-Pitch

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Understanding the Effect of Variability in Bulk FinFET Device Performance

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Virtual fabrication using directed self-assembly for process optimization in a 14-nm dynamic random access memory

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Speeding Up Process Optimization using Virtual Fabrication

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Self-aligned quadruple patterning tomeet requirements for fins with high density

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Self-aligned Fin Cut Last Patterning Scheme for Fin Arrays of 24nm Pitch and Beyond

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Self-Aligned Block and Fully Self-Aligned Via for iN5 Metal 2 Self-Aligned Quadruple Patterning

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Review of virtual wafer process modeling and metrology for advanced technology development

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October 2, 2023
Published by Sandra Liu at October 2, 2023
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Process Window Optimization of DRAM by Virtual Fabrication

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