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March 30, 2018
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Evaluating MEMS Device Virtual Metrology & DRIE
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Whitepaper: Fast Analysis of Acoustic Resonators for the Rapidly Growing Premium RF Filter Market

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CoventorMP includes a FastPZE module that is 30 times faster than competing techniques for predicting the detailed frequency response of bulk acoustic wave resonators. In this paper, we highlight the advantages of using the FastPZE module by reviewing a modeling application for a 3D Lithium Niobate Lateral Vibrating Resonator (LVR).

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