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This paper explores the capabilities of Coventor’s powerful SEMulator3D semiconductor process modeling platform. In this detailed report, MEMS device virtual metrology and virtual fabrication of DRIE based structures is demonstrated. An RF Tunable capacitor, similar to a gyroscope with rotative displacement using comb-drive electrostatic actuation, is used to demonstrate virtual fabrication. Virtual metrology measurements are also extracted for the device. The tunable capacitor modeling exercise illustrates the platform’s capabilities, both in predictive design technology modeling and in virtual measurement data extraction.
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