Fast Analysis of Acoustic Resonators for the Rapidly Growing Premium RF Filter Market
June 5, 2015
New Advancements in Using Statistical Models as Part of a Standard MEMS Design Flow
April 16, 2018

You must have an account on our Customer Portal to access this content. If you already have an account, please log in using the form below or to the right. If you do not have an account, we invite you to request an account.

Existing Users Log In

Whitepaper: Thermo-Mechanical Simulation of Die-Level Packaged 3-axis MEMS Gyroscope Performance

To download your free white paper, please fill out the form below:

In this paper we present accurate thermo-mechanical simulations of a MEMS gyroscope sensor, with its die-level package. The models, simulation tools, methodology and results are presented. The resonance frequency shifts of the modes of interest (drive and 3 sense modes) and the shift in sense capacitances are simulated and compared to experimental results. Simulations compare well with the results. DOI: 10.1109/InertialSensors.2017.8171502 ©2017 IEEE

You might also be interested in: