• Influence of SiGe on Parasitic Parameters in PMOS

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  Influence of SiGe on Parasitic Parameters in PMOS

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• Backside Power Delivery as a Scaling Knob for Future Systems

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  Backside Power Delivery as a Scaling Knob for Future Systems

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• CMOS Area Scaling and the Need for High Aspect Ratio Vias

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  CMOS Area Scaling and the Need for High Aspect Ratio Vias

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• Back-End-of-Line (BEOL) Metallization

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  Back-End-of-Line (BEOL) Metallization

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• Back-End-of-Line (BEOL) Virtual Patterning

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  Back-End-of-Line (BEOL) Virtual Patterning

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