Etch Archives

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A Study of the Impact of Line Edge Roughness on Metal Line Resistance using Virtual Fabrication
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A Study of the Impact of Line Edge Roughness on Metal Line Resistance using Virtual Fabrication
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Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance
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Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance
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The Effects of Poly Corner Etch Residue on Advanced FinFET Device Performance
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The Effects of Poly Corner Etch Residue on Advanced FinFET Device Performance
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A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM
Read more - A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM
A Study of Wiggling AA Modeling and its Impact on Device Performance in Advanced DRAM
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Impact of EUV Resist Thickness on Local Critical Dimension Uniformities for <30 nm CD Via Patterning
Read more - Impact of EUV Resist Thickness on Local Critical Dimension Uniformities for <30 nm CD Via Patterning
Impact of EUV Resist Thickness on Local Critical Dimension Uniformities for <30 nm CD Via Patterning
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New Techniques to Analyze and Reduce Etch Variation
Read more - New Techniques to Analyze and Reduce Etch Variation
New Techniques to Analyze and Reduce Etch Variation
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Evaluating MEMS Device Virtual Metrology & DRIE
Read more - Evaluating MEMS Device Virtual Metrology & DRIE
Evaluating MEMS Device Virtual Metrology & DRIE
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