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  • Ultra-low Resonance Frequency Mems Gravimeter With Off-resonance Closed-loop Control

    Read more - Ultra-low Resonance Frequency Mems Gravimeter With Off-resonance Closed-loop Control
    Figure 1: The MEMS-based gravimeter is comprised of a DRIE etched silicon layer which is anodically-bonded to a partially etched glass wafer
    Ultra-low Resonance Frequency Mems Gravimeter With Off-resonance Closed-loop Control

  • A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer

    Read more - A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer
    Schematic fabrication process of seismometer
    A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer

  • New Advancements in Using Statistical Models as Part of a Standard MEMS Design Flow

    Read more - New Advancements in Using Statistical Models as Part of a Standard MEMS Design Flow
    X-FAB-XMB10-PDK-CoventorMP-Component-Library-and-1-axis-accelerometer-design
    New Advancements in Using Statistical Models as Part of a Standard MEMS Design Flow

  • Thermo-Mechanical Simulation of Die-Level Packaged 3-axis MEMS Gyroscope Performance

    Read more - Thermo-Mechanical Simulation of Die-Level Packaged 3-axis MEMS Gyroscope Performance
    MEMS-gyroscope-and-package-joined
    Thermo-Mechanical Simulation of Die-Level Packaged 3-axis MEMS Gyroscope Performance

  • Fast Analysis of Acoustic Resonators for the Rapidly Growing Premium RF Filter Market

    Read more - Fast Analysis of Acoustic Resonators for the Rapidly Growing Premium RF Filter Market
    coventorware10-pze-resonator
    Fast Analysis of Acoustic Resonators for the Rapidly Growing Premium RF Filter Market

  • Evaluating MEMS Device Virtual Metrology & DRIE

    Read more - Evaluating MEMS Device Virtual Metrology & DRIE
    drie-profile
    Evaluating MEMS Device Virtual Metrology & DRIE

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