• A Study of the Impact of Line Edge Roughness on Metal Line Resistance using Virtual Fabrication

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  A Study of the Impact of Line Edge Roughness on Metal Line Resistance using Virtual Fabrication

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• A Benchmark Study of Complementary-Field Effect Transistor (CFET) Process Integration Options: Comparing Bulk vs. SOI vs. DSOI Starting Substrates

  Read more - A Benchmark Study of Complementary-Field Effect Transistor (CFET) Process Integration Options: Comparing Bulk vs. SOI vs. DSOI Starting Substrates

  

  A Benchmark Study of Complementary-Field Effect Transistor (CFET) Process Integration Options: Comparing Bulk vs. SOI vs. DSOI Starting Substrates

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• Backside Power Delivery as a Scaling Knob for Future Systems

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  Backside Power Delivery as a Scaling Knob for Future Systems

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• Virtual Fabrication and Advanced Process Control Improve Yield for SAQP Process Assessment with 16 nm Half-Pitch

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  Virtual Fabrication and Advanced Process Control Improve Yield for SAQP Process Assessment with 16 nm Half-Pitch

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• CMOS Area Scaling and the Need for High Aspect Ratio Vias

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  CMOS Area Scaling and the Need for High Aspect Ratio Vias

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• Self-Aligned Block and Fully Self-Aligned Via for iN5 Metal 2 Self-Aligned Quadruple Patterning

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  Self-Aligned Block and Fully Self-Aligned Via for iN5 Metal 2 Self-Aligned Quadruple Patterning

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• Modeling of Tone Inversion Process Flow for N5 Interconnect to Characterize Block Tip to Tip

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  Modeling of Tone Inversion Process Flow for N5 Interconnect to Characterize Block Tip to Tip

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• Understanding how small variations in photoresist shape significantly impact multi-patterning yield

  Read more - Understanding how small variations in photoresist shape significantly impact multi-patterning yield

  

  Understanding how small variations in photoresist shape significantly impact multi-patterning yield

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• A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard N5 BEOL two-level metal flow

  Read more - A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard N5 BEOL two-level metal flow

  

  A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard N5 BEOL two-level metal flow

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