September 21, 2022
Figure 2: MEMS+ modal simulation result of a Quad Mass Gyroscope model built using published designs [2]. This Gyroscope comprises two degenerate, anti-phase X- and Y-vibratory modes that can be used in whole-angle mode.

Modeling an Actual Foucault’s Pendulum – Design Implications for MEMS Gyroscopes

Introduction Conventional MEMS gyroscopes are miniaturized devices that measure angular velocity. The performance of current MEMS gyroscopes limits them to stabilization applications, due to bias, scale errors and noise.  If […]
May 19, 2022
Figure 1: The MEMS-based gravimeter is comprised of a DRIE etched silicon layer which is anodically-bonded to a partially etched glass wafer

Measuring Gravity using Gravimeters and MEMS

Paul A.M. Dirac, an English physicist famous for his work in quantum mechanics, once stated “Pick a flower on Earth and you move the farthest star.”  This statement may be […]
November 18, 2021
Figure 1: Commercial True Wireless Stereo earbuds (Courtesy: Apple, Inc.).

Make your Voice Heard: The Latest Advances in MEMS Voice Sensors

In a previous blog post published in September 2020, I stated that MEMS microphone demand is being driven by customer-requested audio features such as stereo sound, voice recognition, sound directivity, […]
September 14, 2020
Figure 2:  Double Backplate MEMS Microphone MEMS+ Model Example

An Explanation of New MEMS Microphone Technology and Design

What is a MEMS Microphone? MEMS (microelectromechanical systems) microphones are micro-scale devices that provide high fidelity acoustic sensing and are small enough to be included in a tightly-integrated electronic product. […]
April 2, 2018
CoventorMP MEMS design automation flow

The Challenge of Modeling the Interaction between MEMS Inertial Sensors and their Packaging

Simulation of Thermal Effects on MEMS Performances MEMS inertial sensors, such as Accelerometers and Gyroscopes, have been commercially successful in the consumer marketplace, where reduced size and cost are more […]
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