Profile variation is one of the most important problems during semiconductor device manufacturing and scaling. These variations can degrade both chip yield and device performance. Virtual fabrication can be used […]
Netlist Extraction is an important SEMulator3D® capability that allows a user to extract parasitic resistance and capacitance for different line and via segments during process modeling. This detailed electrical netlist […]
Transducers 2021 is a prestigious international conference that reviews advances in Solid-State Sensors, Actuators and Microsystems. At this year’s conference, there were 391 papers presented from 29 different countries with […]
Introduction With continuing FinFET device process scaling, micro loading control becomes increasingly important due to its significant impact on yield and device performance [1-2]. Micro-loading occurs when the local etch […]
There are a wide range of promising applications for RF MEMS switches, including use in tunable filters, antennas, tactile radio, and RF ID [1]. Why it is so difficult to […]
People think that semiconductor process simulation libraries should be developed using a perfect theoretical background that is strongly supported by empirical data. This might be true in academic research, where […]
RF MEMS switches are small, micromechanical switches that have low power consumption and can be produced using conventional MEMS fabrication technology. They are similar to a light switch in a […]
What is Piezoelectricity? Piezoelectricity is a property of certain materials to become electrically polarized under strain and stress. This phenomenon has been studied extensively since it was first discovered in […]
In the semiconductor modeling world, no simulation software can do everything. That is, each has its own strengths – process modeling, lithography analysis, and circuit design being a few examples. […]
Micro-Electrical-Mechanical Systems (MEMS) based inertial sensors are used measure acceleration and rotation rate. These sensors are integrated into units to measure motion, direction, acceleration or position, and can be found […]