September 14, 2021

Evaluating the Impact of STI Recess Profile Control on Advanced FinFET Device Performance Using Virtual Fabrication

Profile variation is one of the most important problems during semiconductor device manufacturing and scaling.  These variations can degrade both chip yield and device performance.   Virtual fabrication can be used […]
August 19, 2021

Performing High Accuracy Capacitance Analysis using SEMulator3D

Netlist Extraction is an important SEMulator3D® capability that allows a user to extract parasitic resistance and capacitance for different line and via segments during process modeling. This detailed electrical netlist […]
August 13, 2021

The Latest Techniques that Provide Insight into Package Stress and Temperature Deformation of a MEMS-based Gyroscope

Transducers 2021 is a prestigious international conference that reviews advances in Solid-State Sensors, Actuators and Microsystems.   At this year’s conference, there were 391 papers presented from 29 different countries with […]
June 16, 2021

Using a Virtual DOE to Predict Process Windows and Device Performance of Advanced FinFET Technology

Introduction With continuing FinFET device process scaling, micro loading control becomes increasingly important due to its significant impact on yield and device performance [1-2]. Micro-loading occurs when the local etch […]
June 13, 2021

Overcoming RF MEMS Switch Development Challenges

There are a wide range of promising applications for RF MEMS switches, including use in tunable filters, antennas, tactile radio, and RF ID [1].  Why it is so difficult to […]
May 27, 2021

Using Virtual Process Libraries to Improve Semiconductor Manufacturing

People think that semiconductor process simulation libraries should be developed using a perfect theoretical background that is strongly supported by empirical data. This might be true in academic research, where […]
May 20, 2021

RF MEMS Switches: Understanding their Operation, Advantages, and Future

RF MEMS switches are small, micromechanical switches that have low power consumption and can be produced using conventional MEMS fabrication technology. They are similar to a light switch in a […]
April 29, 2021

Overview of Piezoelectric MEMS: Principles, Applications and the Future

What is Piezoelectricity? Piezoelectricity is a property of certain materials to become electrically polarized under strain and stress. This phenomenon has been studied extensively since it was first discovered in […]
April 15, 2021

Connecting SEMulator3D to Third-Party Design and Analysis Software Using Meshing

In the semiconductor modeling world, no simulation software can do everything. That is, each has its own strengths – process modeling, lithography analysis, and circuit design being a few examples. […]
March 24, 2021

Improving Your Understanding of Advanced Inertial MEMS Design

Micro-Electrical-Mechanical Systems (MEMS) based inertial sensors are used measure acceleration and rotation rate. These sensors are integrated into units to measure motion, direction, acceleration or position, and can be found […]